I suspect you'll need to write the data to another drive before rebuilding the RAID to new config. Could be wrong (and I'm sure someone will correct who is more knowledgeable!) but I wouldn't want to risk losing the data either, so belt and braces approach is to copy it off before building the RAID.
If you're needing new drives anyway to increase capacity it's not such an issue. Depending on how complex the file structure is you could move bits to other computers to free up space. Whatever you have left you need to be able to copy to a USB HDD or if space is a problem you could create a rar archive of it, but that's going to take a good few hours if it's TBs of data.
If you copy it off and rebuilding the array doesn't lose you data then happy days and delete the backups. If it doesn't at least you're not attempting to recover them from borked drives.....
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